Title:
SOLUTION REMOVING AIR KNIFE UNIT
Document Type and Number:
Japanese Patent JP2984639
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To remove chemical solution from the surface of a plate-shaped part, and prevent the chemical solution from drying, solidifying and crystallizing.
SOLUTION: A chemical solution spraying means 4 is provided in a chemical solution removing station 15. Detecting means 7 and 8 are provided near an entrance opening of the chemical solution removing station 15. When an air knife 5 is not being operated, a chemical solution is sprayed by a chemical solution spraying means 4 so that the solution attached to surfaces of the inner wall in the chemical solution removing station 15 or of the air knife 5 is not still dried or solidified, and not crystallized.
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Inventors:
SUMINAKA HIRONOBU
Application Number:
JP32793297A
Publication Date:
November 29, 1999
Filing Date:
November 28, 1997
Export Citation:
Assignee:
KAGOSHIMA NIPPON DENKI KK
International Classes:
B08B5/02; F26B15/12; H01L21/304; (IPC1-7): H01L21/304; B08B5/02; F26B15/12
Domestic Patent References:
| JP4179226A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)