Title:
SPARE DISCHARGE DEVICE OF SLIT COATER
Document Type and Number:
Japanese Patent JP3877719
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a spare discharge device of a slit nozzle capable of efficiently carrying out a rough cleaning and a finishing cleaning of a rotating roller.
SOLUTION: Lid bodies 13, 14 are set up on the upper surface of a cleaning tub 11. A shower nozzle 15 of a first circulating fluid for jetting the circulating cleaning fluid is installed to the lid body 13. A nozzle 16 for jetting a dry gas such as air, nitrogen gas or the like is installed to the lid body 14. And a first squeegee 17, a shower nozzle 18 of a second circulating fluid, a brush roller 19, a second squeegee 20 and a shower nozzle 21 of a new cleaning fluid for jetting the new fluid are arranged in the direction from the lid body 13 toward the lid body 14 on the base line in the rotation direction of a cylindrical priming roller 12.
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Inventors:
Kazunobu Yamaguchi
Shinji Takase
Shinji Takase
Application Number:
JP2003361347A
Publication Date:
February 07, 2007
Filing Date:
October 22, 2003
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
B05C11/10; B05B7/04; B08B1/04; B05B13/02; B05C5/02; B08B3/02; B08B5/02; H01L21/027; (IPC1-7): B05C11/10; B05B7/04; B05B13/02; B05C5/02; B08B1/04; B08B3/02; B08B5/02; H01L21/027
Domestic Patent References:
| JP2001310147A | ||||
| JP2000015165A | ||||
| JP11276970A | ||||
| JP11319682A | ||||
| JP8282823A | ||||
| JP6273919A | ||||
| JP10109074A | ||||
| JP2002001245A | ||||
| JP59083825U |
Attorney, Agent or Firm:
Yu Koyama