To provide a spectroscopic measurement device capable of acquiring light having a desired wavelength with a high resolution.
A spectroscopic camera 1 comprises: a telecentric optical system 11 on which measuring object light is made incident; a wavelength variable interference filter 5 and a wavelength switching section 12 for taking out light having a predetermined wavelength from the incident light; and an imaging section 13 for receiving the light. The wavelength variable interference filter 5 comprises: a fixed substrate; a movable substrate disposed opposite to the fixed substrate; a fixed reflection film provided on the fixed substrate; a movable reflection film provided on the movable substrate and disposed opposite to the fixed reflection film via a gap between the reflection films; and an electrostatic actuator for changing a gap amount of the gap between the reflection films. The wavelength switching section 12 comprises: a plurality of band-pass filters having transmission wavelength ranges different from one another; and a filter switching circuit 18 for switching among the plurality of band-pass filters disposed in an optical path.
| JPH10104070A | 1998-04-24 | |||
| JP2006178320A | 2006-07-06 | |||
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| US20060139780A1 | 2006-06-29 | |||
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| EP0638788A1 | 1995-02-15 |
Osamu Suzawa
Kazuhiko Miyasaka
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