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Title:
SPRING-CONSTANT VARIABLE CANTILEVER
Document Type and Number:
Japanese Patent JP2007047070
Kind Code:
A
Abstract:

To provide a cantilever capable of changing its spring constant, according to the sample to be measured and measurement mode at SPM observation.

The cantilever comprises both a lever part 8 provided with a sharpened probe 9 at its tip and a support part 2 for supporting the lever part 8, and has a mechanism for changing the spring constant of the lever part 8.


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Inventors:
HAMAO HISANORI
MATSUZAWA OSAMU
TAKAHASHI HIROSHI
Application Number:
JP2005233184A
Publication Date:
February 22, 2007
Filing Date:
August 11, 2005
Export Citation:
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Assignee:
SEIKO INSTR INC
International Classes:
G01Q60/36; G01Q60/38
Domestic Patent References:
JPH0763999A1995-03-10
JP2000097825A2000-04-07
JP2000266658A2000-09-29
JP2001091441A2001-04-06
JP2006078219A2006-03-23
Attorney, Agent or Firm:
Yoshiharu Matsushita



 
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