To provide a mechanism that has a fan removed from the vicinity of a linear shaft having a member which linearly moves, and prevents dust from being produced even when the fan is removed from the vicinity of the linear shaft, and a substrate carrier therewith.

The dust production prevention mechanism comprises: a front-end opening and a rear-end opening 155 formed at a front-end part and a rear-end part of a base member 134 in forward/backward movement directions of a slide member 107; a center opening 156 formed between the front-end opening and rear-end opening of the base member 134; an inner cover 171 installed covering the center opening 156 between the front-end opening and rear-end opening and having its front end and rear end reaching the front-end opening and rear-end opening; and an auxiliary cover 172 covering the front-end opening and rear-end opening, wherein a pump action is generated by a slide member.