Title:
SUBSTRATE CARRYING AND PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2016094629
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate carrying and processing apparatus capable of processing a substrate with a carrying position being stabilized by suppressing the disturbance of tension generated in the substrate, in a roll-to-roll substrate processing apparatus.SOLUTION: In a substrate carrying and processing apparatus, a substrate processing part includes a main roll part and a sub-roll part between which a substrate 2 is stretched a plurality of times and which forms a substrate parallel-traveling part where a plurality of substrates 2 travel. The main roll part and the sub-roll par respectively include a plurality of individual main rolls 51a and a plurality of individual sub-rolls 52a. The plurality of individual main rolls 51a are arranged so that the directions of their rotation axes are the same and so that their arrangement direction is the direction of the rotation axes, and each can rotate independently. In the plurality of individual sub-rolls 52a, their arrangement directions are arranged parallel to the direction of the rotation axis of the main roll part. The rotation axes of the individual sub-rolls 52a are arranged to be inclined with respect to the direction of the rotation axis of the main roll part, and each individual sub-roll 52a can rotate independently. The plurality of individual main rolls 51a includes individual main rolls 51a freely rotating without transmission of a drive force from a drive device 54.SELECTED DRAWING: Figure 3
More Like This:
Inventors:
SAKAI HIROSHI
MORI SEIKI
MORI SEIKI
Application Number:
JP2014229463A
Publication Date:
May 26, 2016
Filing Date:
November 12, 2014
Export Citation:
Assignee:
TORAY ENG CO LTD
International Classes:
C23C14/56; B65H20/02; C23C16/44; C23C16/54; H01L31/18
Domestic Patent References:
| JP2005113165A | 2005-04-28 | |||
| JPH06215372A | 1994-08-05 | |||
| JP2007224384A | 2007-09-06 | |||
| JP2014154361A | 2014-08-25 | |||
| JP2013227643A | 2013-11-07 |
Foreign References:
| US20070169695A1 | 2007-07-26 |