Title:
SUBSTRATE CONVEYANCE METHOD AND ITS EQUIPMENT
Document Type and Number:
Japanese Patent JP2005150199
Kind Code:
A
Abstract:
To shorten product turn around time (TAT) of a substrate.
In a clean room, each processor A-D of substrate W is arranged to the order of process, and substrate delivery equipment Ea and Eb for performing delivery of substrate W through a main substrate cassette 1 are arranged in substrate delivery lines L1 which are juxtaposed to each processor A-D. The substrate W is continuously processed for each sheet in the order of processes.
More Like This:
Inventors:
KITAZAWA YASUYOSHI
Application Number:
JP2003382207A
Publication Date:
June 09, 2005
Filing Date:
November 12, 2003
Export Citation:
Assignee:
SHINKO ELECTRIC CO LTD
International Classes:
H01L21/677; H01L21/02; H01L21/68; (IPC1-7): H01L21/68; H01L21/02
Attorney, Agent or Firm:
Tetsuhiro Naito