Title:
SUBSTRATE IMAGING DEVICE, AND SUBSTRATE IMAGING METHOD
Document Type and Number:
Japanese Patent JP2015002241
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate imaging device capable of correcting brightness of each of all images captured by a camera setting a range of a part of a substrate as an imaging range while shifting the imaging range, to the same brightness.SOLUTION: A substrate imaging device 1 comprises: a camera 2 whose imageable range is set to a range of a part of an imaging target substrate 90; a moving mechanism 3 moving the substrate 90 and the camera 2 relatively to each other to move an imaging range of the substrate 90; a moving amount detection sensor 4 for detecting a relative moving amount of the substrate 90 and the camera 2; an imaging timing generation part 7 making the camera 2 capture an image at every predetermined moving amount, on the basis of the detection by the moving amount detection sensor 4; a brightness/darkness evaluation mark 5 imaged by the camera 2 together with the substrate 90; and a correction processing part 9 correcting luminance of the image so that a luminance of the brightness/darkness evaluation mark 5 becomes a predetermined reference luminance, for each image captured by the camera 2.
Inventors:
OTSUKA SATOSHI
YAMANOUCHI MANABU
KAMIHIRA ATSUSHI
YAMANOUCHI MANABU
KAMIHIRA ATSUSHI
Application Number:
JP2013125635A
Publication Date:
January 05, 2015
Filing Date:
June 14, 2013
Export Citation:
Assignee:
HIOKI ELECTRIC WORKS
International Classes:
H05K13/08; G01N21/956; H05K3/34
Attorney, Agent or Firm:
Yoshio Komiya
Hiroyuki Onishi
Hiroyuki Onishi
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