Title:
基板処理方法及び基板処理装置
Document Type and Number:
Japanese Patent JP3976084
Kind Code:
B2
More Like This:
Inventors:
Katsuhiko Miya
Akira Izumi
Akira Izumi
Application Number:
JP18849198A
Publication Date:
September 12, 2007
Filing Date:
July 03, 1998
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
B08B3/04; H01L21/304; F26B5/08
Domestic Patent References:
| JP9260338A | ||||
| JP104079A | ||||
| JP1022370A | ||||
| JP1074686A | ||||
| JP9330904A | ||||
| JP878368A | ||||
| JP423325A |
Attorney, Agent or Firm:
Tsutomu Sugiya