To realize inspection by which sufficient measurement accuracy can be obtained and to enable inspection of an inspection circuit.
The substrate includes a plurality of pixels which are arranged in matrix, a plurality of switching elements which are respectively provided in correspondence to the plurality of the pixels, and connect a plurality of signal lines and the pixels, a differential amplifier 4a which includes a first terminal inputted with a first potential signal, and a second terminal inputted with a second potential signal, compares the first potential signal and the second potential signal, obtains the comparison result making the potential of the first terminal lower if the potential signal of the first potential is lower and making the potential of the first terminal higher if the first potential signal is high, thereby binarizing the potential of the prescribed signal line among the plurality of the signal lines connected to at least either of the first and second terminals at the time of inspection of the pixels, and a voltage supply means for supplying the potentials different from each other to the first and second terminals in order to inspect the differential amplifier.
COPYRIGHT: (C)2006,JPO&NCIPI
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Osamu Suzawa