PURPOSE: To improve the purity of super pure water by providing a vapor separation module comprising a non-porous membrane which is in contact with a vapor stream and allows only the gases to be permeated and separated.
CONSTITUTION: Pretreated water is introduced into an evaporator 1 by a pump 9 and heated by a heating means 8 to be vaporized. The vapor is then passed through a gas-liquid separator 7 to a membrane module 2. The vapor which has permeated the module is introduced into a condenser 4 together with pure N2 which has been stored in advance to be condensed. The condensed water is stored in a receiving tank 5 as super pure water 6. In this case, non-porous membranes which are permeable only to gases to separate them are used in the membrane module 2.
CHINO KOICHI
FUNABASHI KIYOMI
SUZUKI KAZUMICHI
| JPS63162003A | 1988-07-05 |