Title:
SURFACE INSPECTION DEVICE
Document Type and Number:
Japanese Patent JPH01207877
Kind Code:
A
Abstract:
PURPOSE:To eliminate a pseudo defect and to inspect only a normal defect by comparing picture data image-picked up by illumination and defective pattern data, totaling coincident pattern codes, and deciding the defect. CONSTITUTION:When a semiconductor wafer 1 is illuminated, only the reflected light of a defective part is entered an image pickup device 2, and an luminescent line is image-picked up. Picture data 3-1 and defective pattern data 3-2 are stored in a memory 3. Next, data in a small data in the data 3-1 and and the data 3-2 are compared by a circuit 5 to determine the pattern codes, and coincident code numbers are stored in a memory part 13. When this is executed for the whole of the picture data, and the respective coincident code numbers are totaled at a totaling circuit 6, the frequencies of the individual codes are detected. A defect deciding part 14 decides that a specific code number having a high frequency is a defective code number and generates an alarm. Thus, the pseudo defect can be eliminated, and only the normal defect can be inspected.
Inventors:
TSUKAHARA HIROYUKI
NAKAJIMA MASAHITO
HIZUKA TETSUO
HIRAOKA NORIYUKI
KAKIGI GIICHI
UZUMAKI TAKUYA
NAKAJIMA MASAHITO
HIZUKA TETSUO
HIRAOKA NORIYUKI
KAKIGI GIICHI
UZUMAKI TAKUYA
Application Number:
JP3349388A
Publication Date:
August 21, 1989
Filing Date:
February 16, 1988
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G01N21/88; G01N21/956; G06T1/00; H01L21/66; (IPC1-7): G01N21/88; G06F15/62; H01L21/66
Attorney, Agent or Firm:
Eisuke Suzuki