Title:
THERMO-ELECTRIC FIELD EMISSION ELECTRON GUN
Document Type and Number:
Japanese Patent JP3264775
Kind Code:
B2
Abstract:
PURPOSE: To provide a stable electron beam with good reproducibility in a short time by forming a suppresser electrode from either titanium whose hydrogen content is not greater than a predetermined amount or an alloy composed chiefly of titanium.
CONSTITUTION: A tungsten single crystal needle 1 having a (100) axial orientation and provided with a cover layer made of zirconium and oxygen is welded to tungsten filaments 2 used for supporting and heating. The filaments 2 are welded also to metallic columns 4 passed through an insulator 5 and held in place. A suppresser electrode 3 properly adjusts the projected length of the needle 1 and is secured to the insulator 5 by the tightening of a holding screw 6 provided on the side of the electrode 3. The electrode 3 is made of either titanium with a hydrogen content of 60ppm or less, or an alloy composed chiefly of titanium.
Inventors:
Katsuyoshi Tsunoda
Yoshinori Terui
Yoshinori Terui
Application Number:
JP14811594A
Publication Date:
March 11, 2002
Filing Date:
June 29, 1994
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KABUSHIKI KAISHA
International Classes:
H01J1/304; H01J3/02; H01J37/073; (IPC1-7): H01J37/073; H01J1/30
Domestic Patent References:
| JP612973A | ||||
| JP684451A | ||||
| JP684452A | ||||
| JP62122037A | ||||
| JP294237A | ||||
| JP57189441A |