PURPOSE: To reduce the number of working processes and to enhance workability, yield and reliability by anodically bonding a sensor substrate and a support member and etching the sensor substrate using the support member as a musk material to form a thin film part.
CONSTITUTION: A sensor substrate 1 having gauge elements 7 formed thereon and a support member 2 having a through-hole 5 are bonded by anodic bonding. The support member 2 and the through-hole 5 are used as a mask and the sensor substrate 1 is etched to form a membrane part to produce a pressure sensor. Since the support member is used as the mask, it becomes unnecessary to perform a photolithographic process and the number of processes can be reduced. Since the sensor substrate 1 and the support member 2 are bonded at first, strength, workability and yield are enhanced. The reliability of a bonded part is enhanced because of the anodic bonding.
YAMAMOTO YOSHIKI
TAKAHASHI YUKIO
Next Patent: SEMICONDUCTOR PRESSURE SENSITIVE ELEMENT