【発明の名称】露光方法

Title:

【発明の名称】露光方法

Document Type and Number:

Japanese Patent JP3384049

Kind Code:

B2

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Inventors:

Kousuke Suzuki

Application Number:

JP21767593A

Publication Date:

March 10, 2003

Filing Date:

September 01, 1993

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

G03F9/00; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G03F9/00

Domestic Patent References:

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