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Title:
【発明の名称】フラーレン薄膜製造方法
Document Type and Number:
Japanese Patent JP2692644
Kind Code:
B2
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Inventors:
Kuroshima Sadanori
Application Number:
JP10197895A
Publication Date:
December 17, 1997
Filing Date:
April 26, 1995
Export Citation:
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Assignee:
NEC
International Classes:
C01B31/02; B01J19/12; C23C14/06; (IPC1-7): C01B31/02; B01J19/12; C23C14/06
Other References:
CHEMICAL PHYSICS LETTERS=1993
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)



 
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