【発明の名称】エピタキシャルシリコン及びケイ化物の配置方法及びその装置 - Inter-University Micro-Electronica Centrum Ve Zet Be

Title:

【発明の名称】エピタキシャルシリコン及びケイ化物の配置方法及びその装置

Document Type and Number:

Japanese Patent JPH03504850

Kind Code:

A

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Inventors:

Nigis, Joan Francis Albert
Max, Karen Irma-Joseph

Application Number:

JP50453590A

Publication Date:

October 24, 1991

Filing Date:

February 23, 1990

Export Citation:

Assignee:

Inter-University Micro-Electronica Centrum Ve Zet Be

International Classes:

C30B29/06; C23C16/44; C30B25/02; C30B29/10; (IPC1-7): C30B29/06; C30B29/10

Attorney, Agent or Firm:

Aoyama Ryo (1 person outside)

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