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Title:
NEUTRAL PARTICLE IMPLANTING METHOD AND ITS DEVICE
Document Type and Number:
Japanese Patent JPS59196600
Kind Code:
A
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Inventors:
SHIMIZU KEIZOU
Application Number:
JP7023383A
Publication Date:
November 07, 1984
Filing Date:
April 21, 1983
Export Citation:
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Assignee:
KOGYO GIJUTSUIN
International Classes:
H05H1/22; H01J37/317; H01L21/265; (IPC1-7): H05H1/22
Domestic Patent References:
JPS53136798A1978-11-29
JPS5787056A1982-05-31
Attorney, Agent or Firm:
Director, Electronic Technology Research Institute, AIST



 
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