Title:
PHOTORITHOGRAPHY
Document Type and Number:
Japanese Patent JPS5990927
Kind Code:
A
Abstract:
PURPOSE:To enhance resolution and film remaining coefficient by conducting exposure and development under the condition that the surface is shielded from the ambient including the oxygen after forming a photo resist film using the photo resist having reduced sensitivity to oxygen and then covering it with a protection film consisting of the resin having small oxygen transmitting coefficient. CONSTITUTION:As a resin for forming a protection film, a poly-vinyl alcohol system resin, for example, can be considered. The polyvinyl alcohol aqueous solution of 5% is applied on the photo resist film 21. A protection film 22 is formed by removing water in the applied film through heat processing. When the surface is exposed to the ultraviolet rays 5 through the photo mask 4, the photo resist film 21 sensed through the protection film 22. The cross-shaded area of the photo resist 21 is brideged and becomes unsoluble part, while the shaded area is not sensed and dissolves to the developer. The protection film 22 is removed by the exclusive remover and the photo resist film 21 is developed by the n-heptane and then rinsed by the butyl acetate. The surface is dried up and the photo resist image 23 can be obtained.
Inventors:
NAKAMURA HATSUO
KATOU CHIHARU
KATOU CHIHARU
Application Number:
JP19976782A
Publication Date:
May 25, 1984
Filing Date:
November 16, 1982
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
G03F7/20; H01L21/027; (IPC1-7): H01L21/30; G03F7/20
Attorney, Agent or Firm:
Eiji Morota
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