Title:
TRANSFER DEVICE
Document Type and Number:
Japanese Patent JP3910938
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a transfer device generating no dust caused by friction even with simple structure.
SOLUTION: This transfer device includes horizontal transfer means for transferring in a horizontal direction by thrust force of a horizontal axis linear motor 1 of a type of a transverse magnetic flux of a permanent magnet excitation, and a vertical transfer means placed on the horizontal transfer means, for transferring in a vertical direction an object by thrust force of a vertical axis linear motor 2 of a type of a transverse magnetic flux of a permanent magnet excitation.
Inventors:
Ginger
Gold dragon
Gold dragon
Application Number:
JP2003147936A
Publication Date:
April 25, 2007
Filing Date:
May 26, 2003
Export Citation:
Assignee:
KOREA ELECTROTECHNOLOGY RESEARCH INSTITUTE
International Classes:
B65G54/02; B60L13/10; B65G25/00; H01L21/677; H02K41/02; H02K41/03; (IPC1-7): B65G54/02; B65G25/00; H01L21/68
Domestic Patent References:
| JP8091570A | ||||
| JP11205910A | ||||
| JP7251931A |
Attorney, Agent or Firm:
Miaki Kametani
Tetsuo Kanamoto
Koji Hagiwara
Tetsuo Kanamoto
Koji Hagiwara