Title:
TWO-DIMENSIONAL MEMS TRIBOMETER WITH COMB DRIVE
Document Type and Number:
Japanese Patent JP2016122015
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a two-dimensional micro-electromechanical systems (MEMS) nano-indenter converter.SOLUTION: An MEMS nano-indenter converter includes a main body, a movable probe holding a detachable indenter chip 205, a first micro mechanical comb drive, and a second micro mechanical comb drive. The first micro mechanical comb drive includes a plurality of capacitance actuators driving a probe along a first axis in an indentation direction and a plurality of differential capacitance sensors indicating the position of the probe in the first axial direction. The second micro mechanical comb drive includes a plurality of capacitance actuators driving the probe along a second axis perpendicular to the first axis, and a plurality of differential capacitance sensors indicating the position of the probe in the second axial direction. The respective capacitance actuators and the respective differential capacitance sensors comprise electrode comb pairs, which each include a fixed electrode comb coupled to the main body and a movable electrode comb connected to the probe.SELECTED DRAWING: Figure 1
Inventors:
OH YUNJE
SYED AMANULA SYED ASIF
WARREN ODEN
SYED AMANULA SYED ASIF
WARREN ODEN
Application Number:
JP2016030312A
Publication Date:
July 07, 2016
Filing Date:
February 19, 2016
Export Citation:
Assignee:
HYSITRON INC
International Classes:
G01N3/42
Domestic Patent References:
| JPH09166606A | 1997-06-24 | |||
| JP2000501842A | 2000-02-15 | |||
| JPH0965491A | 1997-03-07 |
Foreign References:
| WO2010003149A1 | 2010-01-07 | |||
| WO2011137451A2 | 2011-11-03 |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Hiroshi Okabe
Mitsuo Tanaka
Hiroshi Okabe
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