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Title:
UNIFORMLY HEATING METHOD FOR CIRCULAR PLATE-FORM WORKPIECE
Document Type and Number:
Japanese Patent JP2002075899
Kind Code:
A
Abstract:

To provide a uniform heating method for heating a circular plate-form workpiece with uniform distribution of temperature and superior heating efficiency.

In the method in which a circular plate-form workpiece 1 is heated uniformly at temperatures with a lamp 3, one or more annular lamps are provided with its annular shape in parallel with the flat face of the plate- form workpiece, and a tube-shaped reflective body 4 is provided concentrically around the circumference of the lamp or the lamp group. On both sides of the plate-form workpiece, one or more circular lamps in parallel with their annular faces are provided, and a tube-shaped body is provided concentrically around the outer circumference of the lamp group facing both the sides of the workpiece.


Inventors:
AZUMI TADAHIKO
Application Number:
JP2000262763A
Publication Date:
March 15, 2002
Filing Date:
August 31, 2000
Export Citation:
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Assignee:
ULVAC RIKO INC
International Classes:
C23C14/50; C23C16/46; F27D11/02; H01L21/26; (IPC1-7): H01L21/26; C23C14/50; C23C16/46; F27D11/02
Domestic Patent References:
JP2000068222A2000-03-03
JPS63186424A1988-08-02
JPH06168894A1994-06-14
JPH10321547A1998-12-04
Attorney, Agent or Firm:
Kinichi Kitamura (1 person outside)