Title:
UV-LED LIGHT SOURCE DEVICE
Document Type and Number:
Japanese Patent JP2019207276
Kind Code:
A
Abstract:
To provide a light source device to be used for an exposure apparatus or the like, in particular, a light source device that can highly efficiently use luminous fluxes from a plurality of LEDs by appropriately combining a UV-LED and a CPC (composite paraboloidal condenser) and that presents advantages such as being environmentally friendly, suppressing a running cost by energy saving, having a long service time and facilitating maintenance.SOLUTION: A UV-LED light source 1 in accordance with the present invention includes: a UV-LED module 2 comprising a plurality of UV-LEDs 4 two-dimensionally arranged on a substrate; and a CPC array 3 having a plurality of CPCs 5 disposed at a predetermined distance from the above module in such a manner that a small diameter side of the CPC opposes the light-emitting side of the corresponding UV-LED 4.SELECTED DRAWING: Figure 1
Inventors:
TAKIGAWA SATOSHI
Application Number:
JP2018101437A
Publication Date:
December 05, 2019
Filing Date:
May 28, 2018
Export Citation:
Assignee:
KEMET JAPAN CO LTD
International Classes:
G03F7/20; G02B3/00; G02B19/00
Attorney, Agent or Firm:
Inokari Mitsuru