Title:
VACUUM APPARATUS AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2010028905
Kind Code:
A
Abstract:
To provide a high-vacuum apparatus used in a high vacuum atmosphere of 110-4 Pa or below.
The vacuum apparatus is used in a vacuum atmosphere and its surface is coated with epoxy resin. The epoxy resin composition is 0.3% or below in water absorption at 23C stipulated by the ASTM (American Society for Testing and Materials) D570 standard and 10 to 2,000 m in film thickness.
Inventors:
HAMAO SATOKAZU
OGUMA KIYONORI
OGUMA KIYONORI
Application Number:
JP2008184357A
Publication Date:
February 04, 2010
Filing Date:
July 16, 2008
Export Citation:
Assignee:
YASKAWA ELECTRIC CORP
International Classes:
H02K3/44; C08G59/40; H01F5/00; H01F5/06; H02K3/30
Domestic Patent References:
JPH07322579A | 1995-12-08 | |||
JPH0696981A | 1994-04-08 | |||
JP2006193615A | 2006-07-27 | |||
JP2008072817A | 2008-03-27 | |||
JP2006034042A | 2006-02-02 | |||
JP2005229697A | 2005-08-25 |