Title:
減圧乾燥装置
Document Type and Number:
Japanese Patent JP7407756
Kind Code:
B2
Abstract:
To provide a vacuum dryer capable of efficiently recovering a coating liquid from air discharged from a chamber part.SOLUTION: The vacuum dryer comprises: a chamber part that forms a vacuum environment; a vacuum pump that depressurizes the inside of the chamber part; and a cold trap that cools air discharged from the vacuum pump to discharge cooled air via an exhaust channel while condensing a liquid present in the air, wherein the exhaust channel of the cold trap is provided with an exhaust resistance part that restricts the flow of the air.SELECTED DRAWING: Figure 1
Inventors:
Shintaro Maeda
Application Number:
JP2021040388A
Publication Date:
January 04, 2024
Filing Date:
March 12, 2021
Export Citation:
Assignee:
Toray Engineering Co., Ltd.
International Classes:
F26B5/04
Domestic Patent References:
| JP2010016215A | ||||
| JP2013164231A |