PURPOSE: To improve the step coverage with the film forming device by eliminating the parts which optically shade a substrate from the particles advancing rectilinearly from an evaporating source and forming a stuck film having a uniform thickness on the substrate which has formed fine patterns and step parts.

CONSTITUTION: This vacuum forming device consists of a substrate holder 1 which is disposed to face an electrode or the evaporating source 11, etc., and holds the substrate 10, a revolving shaft 6 which is connected turnably with this substrate holder 1 and an energizing means 4 which is provided being in contact with the above-mentioned substrate holder 1 and drives the holder according to the rotting motion of the revolving shaft 6. The above-mentioned substrate holder 1 is vertically oscillated and moved around a connecting part 2 with the revolving shaft 6.