Title:
VACUUM PROCESSING APPARATUS AND OPERATING METHOD THEREOF
Document Type and Number:
Japanese Patent JP2015191932
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vacuum processing apparatus, capable of improving conveyance efficiency in a situation where cleaning and seasoning are inevitably performed using a dummy wafer before and after a product wafer is processed, and an operating method of the vacuum processing apparatus.SOLUTION: In an operating method of a vacuum processing device, when a dummy wafer is conveyed in a vacuum processing chamber via a vacuum conveyance container, which is the same vacuum conveyance container conveying the dummy wafer at a previous time, among a plurality of conveyance containers, the vacuum processing chamber being connected to the vacuum conveyance container (S500-S503), the dummy wafer is conveyed in a load lock chamber not via an alignment mechanism in an atmosphere conveyance container (S504).
Inventors:
FUJISHIMA MASAYOSHI
KAWAGUCHI MICHINORI
TSUBAKI TAKESHI
KAWAGUCHI MICHINORI
TSUBAKI TAKESHI
Application Number:
JP2014066176A
Publication Date:
November 02, 2015
Filing Date:
March 27, 2014
Export Citation:
Assignee:
HITACHI HIGH TECH CORP
International Classes:
H01L21/677; H01L21/02
Attorney, Agent or Firm:
Polaire Patent Business Corporation
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