Title:
VACUUM VESSEL UNIT
Document Type and Number:
Japanese Patent JPS6012700
Kind Code:
A
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Inventors:
NISHIMURA SHINICHI
SAKURAI MITSUO
SAKURAI MITSUO
Application Number:
JP12033483A
Publication Date:
January 23, 1985
Filing Date:
July 04, 1983
Export Citation:
Assignee:
TOSHIBA KK
International Classes:
B01J3/00; B01J3/03; H05H7/14; (IPC1-7): H05H7/14; B01J3/03
Attorney, Agent or Firm:
Yoshiaki Inomata