PURPOSE: To improve attaching operation and detaching operation of an evaporation source provided to the inside of the titled device by allowing both electroconductional connection and positioning fixation for a vacuum tank and a vapor deposition jig to be made independent respectively as an exclusive mechanism.

CONSTITUTION: This vapor deposition device is formed from a vacuum tank 27, a vapor deposition jig 100 capable of attaching and detaching a vapor deposition source 4 to/form the vacuum tank 27 in such a state that the vapor deposition source 4 is mounted on a bottom plate 18 and electrode terminal means, etc. These electrode terminal means consist of spring members 28 and stands provided parallel thereto and feed a plural electric power sources to the above- mentioned jig 100. The electric connection of the jig 100 and the vacuum tank 27 is performed with the spring members 28. Further the positioning of the jig and the vacuum tank 27 is performed by the stands.