To provide a vibration eliminating device for suppressing or eliminating vibration of an object without using a base free of vibration as a reference.
The vibration eliminating device 10 comprises an acceleration sensor 12 for detecting the acceleration of a surface plate 8 as the vibration eliminated object, a device body 20 including an inertial body and an actuator mechanism for driving the inertial body to be moved, a control part 16 for controlling the drive of the actuator mechanism of the device body 20 depending on a value detected by the acceleration sensor 12, and a fluid supply part 14 for supplying fluid to the device body 20 to support the inertial body with the fluid. The device body 20 including the inertial body held by a holding spring having a spring constant inferior in vibration property is mounted on the surface plate 8.
HARA TOSHIFUMI
SASAKI KATSUMI
| JPS494078A | 1974-01-14 | |||
| JPH0972375A | 1997-03-18 | |||
| JPS63283835A | 1988-11-21 | |||
| JPS5998147A | 1984-06-06 | |||
| JPH08170446A | 1996-07-02 |
Jun Ishida
Next Patent: RECIPROCATING SHAFT SEALING DEVICE