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Title:
VIBRATOR, AND VIBRATION ACTUATOR HAVING VIBRATOR
Document Type and Number:
Japanese Patent JP2001298967
Kind Code:
A
Abstract:

To obtain a vibrator and a vibration actuator that have the improved productivity of the vibrator actuator, a small number of wirings, and a small place for routing wiring, and are highly reliable.

This vibrator is provided with an electromechanical energy conversion element 1 having a disk shape where a hollow part is formed, and at least first electrodes 2a and 2b that are divided into a diameter direction on one surface and a second electrode 2c being provided on nearly the entire surface of the other surface while the vibrator is provided on both the opposing surfaces of the electromechanical energy conversion element 1. In the vibrator, the first electrodes 2a and 2b and the second electrode 2c are made of one portion of a flexible substrate for connecting the electromechanical energy conversion element 1 and a drive circuit, and is made of a conductive part being exposed from an insulator for composing the flexible substrate.


Inventors:
SUGAYA ISAO
Application Number:
JP2000113022A
Publication Date:
October 26, 2001
Filing Date:
April 14, 2000
Export Citation:
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Assignee:
NIKON CORP
International Classes:
H02N2/00; (IPC1-7): H02N2/00



 
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