Title:
VOLATILE DIHYDROPYRAZINYL AND DIHYDROPYRAZINE METAL COMPLEX
Document Type and Number:
Japanese Patent JP2015042781
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a volatile dihydropyrazinyl and a dihydropyrazine metal complex.SOLUTION: A composition containing dihydropyrazinyl anion provides a volatile metal complex which is coordinated with a wide variety of metals as a six-electron ligand to form ALD and CVD deposit. A non-deprotonation dihydropyrazine capable of being coordinated with metals as a stabilized neutral ligand is also provided. The composition is used e.g. in direct liquid injection supply of a metal dihydropyrazinyl complex precursor into an ALD or CVD chamber for deposition of a metal-containing thin film, e.g. a ruthenium or cobalt metal film.
Inventors:
SERGEI VLADIMIROVICH IVANOV
LEI XINJIAN
NORMAN JOHN A T
LEI XINJIAN
NORMAN JOHN A T
Application Number:
JP2014151758A
Publication Date:
March 05, 2015
Filing Date:
July 25, 2014
Export Citation:
Assignee:
AIR PROD & CHEM
International Classes:
C23C16/18; C23C16/455; H01L21/285; H01L21/316
Domestic Patent References:
| JP2008516956A | 2008-05-22 | |||
| JP2006511716A | 2006-04-06 | |||
| JP2006257073A | 2006-09-28 | |||
| JP2005314414A | 2005-11-10 | |||
| JP2008516956A | 2008-05-22 | |||
| JP2006511716A | 2006-04-06 | |||
| JP2006257073A | 2006-09-28 | |||
| JP2005314414A | 2005-11-10 |
Foreign References:
| US20120231611A1 | 2012-09-13 | |||
| US20060083857A1 | 2006-04-20 | |||
| US20090291208A1 | 2009-11-26 | |||
| US7064224B1 | 2006-06-20 | |||
| US20120231611A1 | 2012-09-13 | |||
| US20060083857A1 | 2006-04-20 | |||
| US20090291208A1 | 2009-11-26 | |||
| US7064224B1 | 2006-06-20 |
Attorney, Agent or Firm:
Aoki 篤
Ishida 敬
Tetsuji Koga
Kenji Kimura
Nobuo Sekine
Ebita 尚則
Satoru Ideno
Ishida 敬
Tetsuji Koga
Kenji Kimura
Nobuo Sekine
Ebita 尚則
Satoru Ideno