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Patent Searching and Data


Title:
WORK PIECE INSTALLING STRUCTURE OF WIRE SAW
Document Type and Number:
Japanese Patent JP2000052225
Kind Code:
A
Abstract:

To provide a work piece installing structure of a wire saw which can suppress the warp of a cut work piece.

While a slice base 46 is formed of a low heat conductive material, and a material with the linear expansion coefficient almost same as an ingot 32, the thickness of the slice base 46 is made in the thickness to absorb the heat expansion difference of a work plate 42 to the ingot 32, and the expansion of the ingot 32 side is made within the allowable scope. As a result, it can be prevented that the heat expansion of the work plate 42 and the slice base 46 gives an influence to the ingot 32.


Inventors:
YAMAMOTO SEIJI
Application Number:
JP13186699A
Publication Date:
February 22, 2000
Filing Date:
August 06, 1998
Export Citation:
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Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
B24B27/06; B28D5/04; B28D7/04; H01L21/304; (IPC1-7): B24B27/06; B28D7/04; H01L21/304
Attorney, Agent or Firm:
Kenzo Matsuura