Title:
レジスト下層膜形成用組成物
Document Type and Number:
Japanese Patent JPWO2008143302
Kind Code:
A
Inventors:
Yosuke Imano
Nomura 仲篤
Nomura 仲篤
Application Number:
JP2008059387W
Publication Date:
November 27, 2008
Filing Date:
May 21, 2008
Export Citation:
Assignee:
JSR, Inc.
International Classes:
G03F7/11; C08F232/08
Attorney, Agent or Firm:
Hiroyuki Sato
Shigeru Koike
Koji Kikawa
Ippei Watanabe
Sugano Chongqing
Shigeru Koike
Koji Kikawa
Ippei Watanabe
Sugano Chongqing