DRYING DEVICE, LIGHT IRRADIATION DEVICE, AND COATING SYSTEM

Title:

DRYING DEVICE, LIGHT IRRADIATION DEVICE, AND COATING SYSTEM

Document Type and Number:

Japanese Patent JP2017201219

Kind Code:

A

Abstract:

PROBLEM TO BE SOLVED: To provide a drying device capable of simultaneously, efficiently and neatly drying a plurality of slices of substrates coated with a liquid agent at end faces and peripheral edge portions of the substrates while being miniaturized.SOLUTION: A drying device 30 including a drying chamber 31 for drying substrates 2, a carrying-in device 81 for carrying the substrates 2 into the drying chamber 31, and a carrying-out device 91 for carrying out the substrates 2 from the drying chamber 31. The drying chamber 31 includes a plurality of stages of shelf portions 32 on which the substrates 2 are placed, substrate pressing members 41 disposed while superposed to the shelf portions 32, opening/closing doors 51 for carrying-in corresponding to each of the shelf portions 32, opening/closing doors 52 for carrying-out corresponding to each of the shelf portions 32, an air blowing portion 62 for blowing air in a fixed direction along each side of the substrates 2 placed on the plurality of stages of shelf portions 32, and a suction portion 62 for sucking a gas in the drying chamber 31. The carrying-in device 81 carries the substrate 2 in a space between the shelf portion 32 and the substrate pressing member 41, and the carrying-out device 91 carries out the substrate 2 from a space between the shelf portion 32 and the substrate pressing member 41.SELECTED DRAWING: Figure 2

More Like This:

JP2010164206	METHOD AND DEVICE OF DRYING ADMIXTURE FOR COMPRESSION-MOLDED PLYWOOD
JPS5941944	[Title of the Invention] An automatic plant which performs dryness of a ceramic tile and rapid single phase calcination
JP2002231685	WAFER-CLEANING AND DRYING DEVICE

Inventors:

MATSUYAMA TAKAO
YOSHIZUKA HIDETO

Application Number:

JP2016092474A

Publication Date:

November 09, 2017

Filing Date:

May 02, 2016

Export Citation:

Click for automatic bibliography generation Help

Assignee:

ENATECH CORP

International Classes:

F26B15/12

Domestic Patent References:

JP2010218812A	2010-09-30
JP2007333306A	2007-12-27
JP2001519521A	2001-10-23
JP2010109039A	2010-05-13
JP2003165735A	2003-06-10
JP2011065967A	2011-03-31
JP2013044842A	2013-03-04
JP2002195755A	2002-07-10
JPH02279981A	1990-11-15
JP2011064400A	2011-03-31
JPH1110096A	1999-01-19
JP2002361168A	2002-12-17

Foreign References:

WO2004088742A1	2004-10-14
US4199870A	1980-04-29

Attorney, Agent or Firm:

Ryuji Inuchi
Ichi Takada

Previous Patent: A heat pump system and a method for controlling the same

Next Patent: Heat exchanger