Title:
A laser beam machining device, a laser beam machining method, a manufacturing method of a substrate, and a manufacturing method of an ink jet head
Document Type and Number:
Japanese Patent JP6128809
Kind Code:
B2
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Inventors:
Hiroyuki Morimoto
Kurachi Kosuke
Kurachi Kosuke
Application Number:
JP2012250368A
Publication Date:
May 17, 2017
Filing Date:
November 14, 2012
Export Citation:
Assignee:
Canon Inc
International Classes:
B23K26/00; B23K26/064; B23K26/067; B23K26/60; B41J2/05; B41J2/14; B41J2/16; G02B27/28
Domestic Patent References:
| JP2003126982A | ||||
| JP2003285188A | ||||
| JP2009255150A | ||||
| JP3210580A | ||||
| JP2009061775A |
Attorney, Agent or Firm:
Kazuo Chikajima
Takashi Daejeon
Takashi Daejeon
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