Title:
A light scanning apparatus and a scanning inspection device
Document Type and Number:
Japanese Patent JP6057583
Kind Code:
B2
Inventors:
Shintaro Takahashi
Application Number:
JP2012161519A
Publication Date:
January 11, 2017
Filing Date:
July 20, 2012
Export Citation:
Assignee:
Olympus Endo Technology America Inc.
International Classes:
G02B26/10; G01B11/24
Domestic Patent References:
JP5173085A | ||||
JP2010503537A | ||||
JP2011197609A | ||||
JP2004157246A | ||||
JP8313812A | ||||
JP2006133499A | ||||
JP2003341128A | ||||
JP2005262290A |
Attorney, Agent or Firm:
Kunio Ueda
Noriharu Fujita
Noriharu Fujita