Title:
A manufacturing method of a solar cell
Document Type and Number:
Japanese Patent JP6141670
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar battery capable of improving a conversion efficiency of the solar battery.SOLUTION: A method of manufacturing a solar battery comprising a base material 1 at least having a conductivity type semiconductor layer or an electrode layer, and a first thin film 3 provided on one principal surface side of the base material, includes, in this order: a base material preparation step of preparing the base material 1; a base material opening formation step of emitting a laser beam from the one principal surface side of the base material 1 to form an opening A0 on the base material; and a first thin film formation step of forming the first thin film 3 on the base material 1 where the opening A0 is formed. At the base material opening formation step, it is preferred to emit the laser beam so that a deposit including at least a part of the base material 1 is formed within a region of 500 μm from an end part the opening A0. In addition, it is preferred that the first thin film formation step includes a first thin film opening region formation step of forming the first thin film 3 on the deposit formation region, and further, forming an opening region A1 of the first thin film 3 on the deposit formation region.
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Inventors:
Utsu Hisashi
Daisuke Adachi
Daisuke Adachi
Application Number:
JP2013074843A
Publication Date:
June 07, 2017
Filing Date:
March 29, 2013
Export Citation:
Assignee:
Kaneka Corporation
International Classes:
H01L31/0747; H01L31/0224; H01L31/18
Domestic Patent References:
| JP9129904A | ||||
| JP2007311578A | ||||
| JP201223357A |
Attorney, Agent or Firm:
Masato Shintaku
Yoshimoto Riki
Yoshimoto Riki