Title:
Polishing robot and its control method
Document Type and Number:
Japanese Patent JP6323744
Kind Code:
B2
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Inventors:
Koichiro Hayashi
Application Number:
JP2014012397A
Publication Date:
May 16, 2018
Filing Date:
January 27, 2014
Export Citation:
Assignee:
Ihi Co., Ltd.
International Classes:
B25J13/08; B24B27/00; B24B49/16; B25J9/22
Domestic Patent References:
| JP54025592A | ||||
| JP4183569A | ||||
| JP8216074A | ||||
| JP5265537A | ||||
| JP6031664A | ||||
| JP63180458A | ||||
| JP5009853U | ||||
| JP3245962A | ||||
| JP6312343A | ||||
| JP8257955A | ||||
| JP2010253613A | ||||
| JP2012176477A | ||||
| JP59118371A |
Foreign References:
| US5261768 |
Attorney, Agent or Firm:
Minoru Hotta
Toshihiro Nomura
Toshihiro Nomura
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