Title:
APPARATUS AND METHOD FOR TESTING SEMICONDUCTOR DEVICE BY USING MACHINE LEARNING MODEL
Document Type and Number:
WIPO Patent Application WO/2021/101069
Kind Code:
A1
Abstract:
The present invention relates to the technical idea of testing and determining the degradation condition of a semiconductor device by carrying out machine learning on a TEM/SEM image and the output properties of a semiconductor device, and more specifically the present invention relates to technology for more accurately determining the degradation condition of a semiconductor device by measuring the electrical properties of a semiconductor device under various conditions, obtaining a TEM/SEM image as the electrical properties are measured, and then carrying out machine learning with respect to the measured electrical properties and the TEM/SEM image.
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Inventors:
KIM GYU TAE (KR)
LEE KOOK JIN (KR)
NAM SANG JIN (KR)
LEE KOOK JIN (KR)
NAM SANG JIN (KR)
Application Number:
PCT/KR2020/014012
Publication Date:
May 27, 2021
Filing Date:
October 14, 2020
Export Citation:
Assignee:
UNIV KOREA RES & BUS FOUND (KR)
International Classes:
G01R31/307; G01N21/88; G01N21/95; G06N20/00; G06T5/00
Foreign References:
| KR20170074812A | 2017-06-30 | |||
| JP2001352059A | 2001-12-21 | |||
| KR20190052604A | 2019-05-16 | |||
| KR101059427B1 | 2011-08-25 | |||
| US20030206437A1 | 2003-11-06 |
Attorney, Agent or Firm:
KIM, Youn Gwon (KR)
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