APPARATUS FOR PRODUCING METAL MASK

Title:

APPARATUS FOR PRODUCING METAL MASK

Document Type and Number:

WIPO Patent Application WO/2020/040339

Kind Code:

A1

Abstract:

Provided is an apparatus for producing a metal mask, comprising: a laser unit for generating a laser beam; a beam shaper unit for changing a spot condition of the laser beam; a beam splitter unit for splitting the laser beam into a plurality of laser beams according to a selection; a first condenser lens unit for condensing the laser beam sequentially passing through the beam shaper unit and the beam splitter unit; and a second condensing lens unit for re-condensing the laser beam passing through the first condensing lens unit and irradiating same to a workpiece.

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Inventors:

KIM SEON JOO (KR)
LEE JIN WON (KR)
LEE SUNG JAE (KR)
PARK HYUN WOO (KR)

Application Number:

PCT/KR2018/010045

Publication Date:

February 27, 2020

Filing Date:

August 30, 2018

Export Citation:

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Assignee:

COWINDST CO LTD (KR)

International Classes:

G03F7/20; G03F1/72; H01L51/00; H01L51/56

Foreign References:

KR101582175B1	2016-01-05
KR100879007B1	2009-01-15
KR20100057266A	2010-05-31
KR101882232B1	2018-07-26
KR101176475B1	2012-08-28

Attorney, Agent or Firm:

SEOHAN INTELLECTUAL PROPERTY LAW FIRM (KR)

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