Title:
BAW FILTER STRUCTURE AND PREPARATION METHOD
Document Type and Number:
WIPO Patent Application WO/2023/134252
Kind Code:
A1
Abstract:
The present invention relates to radio frequency filtering technology, and disclosed are a BAW filter structure and a preparation method. With respect to a stress problem in the prior causing industrial production to be unviable, the present solution is provided. Mutually independent piezoelectric thin film units are generated on a surface of an epitaxial substrate to obtain a transfer structure body; a resonance area is arranged on a supporting substrate and a bonding unit is covered to obtain a bonding structure body; upper and lower surfaces of the transfer structure body are flipped, causing a bottom electrode unit to be bonded in a one-to-one correspondence to the resonance area to obtain a BAW structure body; the epitaxial substrate is removed, and a top electrode unit is generated on a surface of a piezoelectric thin film unit originally in contact with the epitaxial substrate. The advantages of the present invention are that due to having a simple structure, a simple process, a high degree of isolation, and a stress problem being extremely small, efficiency is high, yield is high, and implementation costs are low during batch production; the present invention is suitable for application in industrial production, and particularly suitable for industrially manufacturing a monocrystalline thin film device.
Inventors:
WANG MENGYUAN (CN)
Application Number:
PCT/CN2022/126825
Publication Date:
July 20, 2023
Filing Date:
October 21, 2022
Export Citation:
Assignee:
FUJIAN SUNWISE SEMICONDUCTOR TECH CO LTD (CN)
International Classes:
H03H9/17; H03H3/02
Foreign References:
| CN114499450A | 2022-05-13 | |||
| CN110620563A | 2019-12-27 | |||
| US20200358423A1 | 2020-11-12 | |||
| CN107342748A | 2017-11-10 | |||
| CN111082771A | 2020-04-28 | |||
| CN201611135804A | 2016-12-12 | |||
| CN201610028453A | 2016-01-18 |
Other References:
RESEARCH & PROGRESS OF SOLID STATE ELECTRONICS, vol. 41, no. 4, August 2010 (2010-08-01)
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (CN)
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