Title:
BULK ACOUSTIC RESONATOR CAPABLE OF IMPROVING POWER CAPACITY, AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/125150
Kind Code:
A1
Abstract:
Provided in the present invention are a bulk acoustic resonator capable of improving power, and a preparation method therefor. The resonator sequentially comprises a substrate, a first diamond film layer, a piezoelectric layer and a second diamond film layer from bottom to top, wherein a first cavity is formed in the first diamond film layer; a bottom electrode is arranged on an upper surface of the first diamond film layer and located in the piezoelectric layer; the bottom electrode is partially exposed in the first cavity; a second cavity is formed in the second diamond film layer; a top electrode is arranged in the second cavity and located on an upper surface of the piezoelectric layer; first through holes are formed between the top electrode and the bottom electrode, penetrate the top electrode and the bottom electrode, and run through the first cavity and the second cavity; and second through holes are further provided in the second diamond film layer, and run through the second cavity and the outside. The resonator of the present invention can greatly improve the heat dissipation performance of the resonator, thereby greatly reducing the temperature of the resonator, and finally improving the power capacity of the resonator.
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Inventors:
LI GUOQIANG (CN)
Application Number:
PCT/CN2022/140389
Publication Date:
July 06, 2023
Filing Date:
December 20, 2022
Export Citation:
Assignee:
HEYUAN AIFO LIGHT COMMUNICATION TECH CO LTD (CN)
International Classes:
H03H9/02; H03H9/17
Foreign References:
| CN114389562A | 2022-04-22 | |||
| US20070044296A1 | 2007-03-01 | |||
| CN109474252A | 2019-03-15 | |||
| US20210159873A1 | 2021-05-27 | |||
| US20050140247A1 | 2005-06-30 |
Attorney, Agent or Firm:
JIAQUAN IP LAW (CN)
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