Title:
CHARGED BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/082477
Kind Code:
A1
Abstract:
Provided is a charged beam device wherein the accuracy of an automatic focus/astigmatism correction is improved, and an accurate image of a sample surface pattern can be obtained．The charged beam device is comprised of an electron gun (1); a deflection control portion (8) which scans an object using an electron beam; a focus control portion (10) and an astigmatism correction portion (3) for the electron beam; an image processing portion (11); and a switching portion (9) which switches scan conditions when the pattern information of the surface of a sample (1001) is obtained and when the automatic focus/astigmatism correction is performed, so that the scan speeds or the scan procedures are switched when the pattern information is obtained and when the automatic focus/astigmatism correction is performed.
Inventors:
SHIRAHATA KAORI (JP)
NAKAYAMA YOSHINORI (JP)
HITOMI KEIICHIRO (JP)
FUKUDA MUNEYUKI (JP)
SOHDA YASUNARI (JP)
NAKAYAMA YOSHINORI (JP)
HITOMI KEIICHIRO (JP)
FUKUDA MUNEYUKI (JP)
SOHDA YASUNARI (JP)
Application Number:
PCT/JP2010/000133
Publication Date:
July 22, 2010
Filing Date:
January 13, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
SHIRAHATA KAORI (JP)
NAKAYAMA YOSHINORI (JP)
HITOMI KEIICHIRO (JP)
FUKUDA MUNEYUKI (JP)
SOHDA YASUNARI (JP)
SHIRAHATA KAORI (JP)
NAKAYAMA YOSHINORI (JP)
HITOMI KEIICHIRO (JP)
FUKUDA MUNEYUKI (JP)
SOHDA YASUNARI (JP)
International Classes:
H01J37/147; G01B15/00; H01J37/153; H01J37/21; H01J37/22; H01L21/66
Foreign References:
| JPH0831364A | 1996-02-02 | |||
| JPH10162761A | 1998-06-19 | |||
| JPH10154479A | 1998-06-09 | |||
| JP2006108123A | 2006-04-20 | |||
| JP2007059370A | 2007-03-08 | |||
| JP2003346698A | 2003-12-05 |
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
Polaire Intellectual Property Corporation (JP)
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