Title:
CHARGED PARTICLE BEAM DEVICE, OBSERVATION METHOD USING CHARGED PARTICLE BEAM DEVICE, AND, PROGRAM
Document Type and Number:
WIPO Patent Application WO/2017/090100
Kind Code:
A1
Abstract:
The objective of the invention is to allow, in a charged particle beam device, an observation position to be presented even if a large difference exists between the magnification of the observation image and the magnification of an image displaying the observation position. The charged particle beam device comprises: a display unit displaying an operation screen having an observation image display portion (201) displaying the observation image, and an observation position display portion (203) displaying the observation position of the observation image; and a control unit for controlling the process of displaying the operation screen. On the basis of the magnification and the coordinates at the time when the observation image has been acquired, the control unit displays, superposed on the observation position display portion, a plurality of observation position display images (204, 301) which are different in magnification.
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Inventors:
CHIBA HIROYUKI (JP)
HOSHINO YOSHINOBU (JP)
KAWAMATA SHIGERU (JP)
HOSHINO YOSHINOBU (JP)
KAWAMATA SHIGERU (JP)
Application Number:
PCT/JP2015/082989
Publication Date:
June 01, 2017
Filing Date:
November 25, 2015
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/24; H01J37/22
Foreign References:
| JP2014229587A | 2014-12-08 | |||
| JP2012099481A | 2012-05-24 |
Attorney, Agent or Firm:
HIRAKI Yusuke et al. (JP)
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