Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/004533
Kind Code:
A1
Abstract:
Provided is a charged particle beam device which achieves a great increase in throughput by eliminating the positional displacement of an object to be observed by suppressing the change of expansion/contraction of a specimen that is the object to be observed.
Specifically provided is a charged particle beam device characterized by comprising a specimen holding means for holding a specimen, a temperature regulating means capable of regulating the temperature of the specimen, and a temperature regulating means controlling means capable of controlling the temperature regulating means on the basis of various conditions.
Inventors:
MAEDA SHUSAKU (JP)
ISHIGURO KOUJI (JP)
ISHIGURO KOUJI (JP)
Application Number:
PCT/JP2010/003257
Publication Date:
January 13, 2011
Filing Date:
May 14, 2010
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
MAEDA SHUSAKU (JP)
ISHIGURO KOUJI (JP)
MAEDA SHUSAKU (JP)
ISHIGURO KOUJI (JP)
International Classes:
G01B15/00; G01N23/225; H01J37/20; H01L21/66
Foreign References:
| JP2009064726A | 2009-03-26 | |||
| JPH06260126A | 1994-09-16 | |||
| JP2003133402A | 2003-05-09 | |||
| JP2006105960A | 2006-04-20 | |||
| JP2003194746A | 2003-07-09 | |||
| JPH11168056A | 1999-06-22 | |||
| JP2005340719A | 2005-12-08 | |||
| JP2010015732A | 2010-01-21 |
Attorney, Agent or Firm:
INOUE, MANABU (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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