Title:
CHARGED PARTICLE MICROSCOPE DEVICE AND IMAGE CAPTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2012/140874
Kind Code:
A1
Abstract:
In order to capture an image which is of a high quality even in the regions for which it is difficult to obtain a sufficient amount of signal from a specimen, for example the lower layer region in a multi-layer structure or the base of a hole in a hole pattern, a specimen image capture method using a charged particle microscope device is characterised by comprising: a first image acquisition step in which the gain of a detector in a charged particle microscope is set to a first gain value, charged particle beam scanning is carried out on a specimen, and a first image is obtained; a second image acquisition step in which the gain of the detector is set to a second gain value, which is different to the first gain value, charged particle beam scanning is carried out on the specimen, and a second image is obtained; and an image combination step in which the first gain value and the second gain value are used and the first image and the second image are combined.
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Inventors:
NAKAHIRA KENJI (JP)
MIYAMOTO ATSUSHI (JP)
MIYAMOTO ATSUSHI (JP)
Application Number:
PCT/JP2012/002498
Publication Date:
October 18, 2012
Filing Date:
April 11, 2012
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
NAKAHIRA KENJI (JP)
MIYAMOTO ATSUSHI (JP)
NAKAHIRA KENJI (JP)
MIYAMOTO ATSUSHI (JP)
International Classes:
H01J37/22; H01J37/28
Foreign References:
| JP2004208044A | 2004-07-22 | |||
| JP2007220615A | 2007-08-30 | |||
| JP2001202914A | 2001-07-27 | |||
| JPH08227679A | 1996-09-03 | |||
| JP2000131045A | 2000-05-12 | |||
| JP2011119446A | 2011-06-16 |
Attorney, Agent or Firm:
INOUE, Manabu et al. (JP)
Manabu Inoue (JP)
Manabu Inoue (JP)
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Claims: