Title:
CHEMICAL SUPPLY APPARATUS AND OPERATION METHOD OF THE SAME
Document Type and Number:
WIPO Patent Application WO/2024/000185
Kind Code:
A1
Abstract:
A chemical supply apparatus (1) is provided. The chemical supply apparatus (1) includes a protecting structure (10), a peristaltic pump (11), and a fluid pipe (12). The protecting structure (10) has a first opening (100) and a second opening (105), and the second opening (105) is located above the first opening (100). The peristaltic pump (11) is disposed on the protecting structure (10). The fluid pipe (12) is disposed in the protecting structure (10) and the peristaltic pump (11). The first opening (100) and the second opening (105) are facing towards the same direction. The fluid pipe (12) connects the first opening (100) and the second opening (105). The peristaltic pump (11) is configured to control fluid in the fluid pipe (12). The protecting structure (10) is adapted to cover an outlet (20) of a chemical fluid container (2). An operation method of a chemical supply apparatus (1) is also provided.
Inventors:
LIU RUI (CN)
Application Number:
PCT/CN2022/102005
Publication Date:
January 04, 2024
Filing Date:
June 28, 2022
Export Citation:
Assignee:
INNOSCIENCE SUZHOU SEMICONDUCTOR CO LTD (CN)
International Classes:
F04B43/12
Domestic Patent References:
| WO2016202655A1 | 2016-12-22 |
Foreign References:
| CN211913667U | 2020-11-13 | |||
| CN216518550U | 2022-05-13 | |||
| US20190298896A1 | 2019-10-03 | |||
| US20200377241A1 | 2020-12-03 | |||
| CN208831209U | 2019-05-07 | |||
| CN210829680U | 2020-06-23 |
Attorney, Agent or Firm:
BEIJING BESTIPR INTELLECTUAL PROPERTY LAW CORPORATION (CN)
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