Title:
COATING APPLICATOR
Document Type and Number:
WIPO Patent Application WO/2010/087314
Kind Code:
A1
Abstract:
Provided is a coating applicator (100) which applies a solution droplet jetted from the nozzle of an applying head on a substrate. The coating applicator has a substrate holding/moving means (30) which holds a substrate (K) and circularly moves such that the substrate (K) is sequentially positioned at a jetting position where a solution is jetted by means of an applying head (7), an image pickup position where images are picked up by means of a camera (23), and a cleaning position where a cleaning apparatus (26) performs cleaning.
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Inventors:
IHARA KAZUHIKO (JP)
Application Number:
PCT/JP2010/050925
Publication Date:
August 05, 2010
Filing Date:
January 25, 2010
Export Citation:
Assignee:
SHIBAURA MECHATRONICS CORP (JP)
IHARA KAZUHIKO (JP)
IHARA KAZUHIKO (JP)
International Classes:
B05C13/00; B05C9/12; H01L21/027
Foreign References:
| JP2003243281A | 2003-08-29 | |||
| JP2006122901A | 2006-05-18 | |||
| JPH0429153A | 1992-01-31 |
Attorney, Agent or Firm:
SUZUYE, Takehiko et al. (JP)
Takehiko Suzue (JP)
Takehiko Suzue (JP)
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