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Title:
COMPOSITE SILICON CARBIDE SUBSTRATE AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/040880
Kind Code:
A1
Abstract:
The present application provides a composite silicon carbide substrate and a preparation method therefor. The composite silicon carbide substrate comprises a single crystal layer, a bonding layer and a supporting layer stacked in sequence; a periodic atomic-scale step structure is arranged on a side surface of the single crystal layer; and the atomic-scale step structure comprises any one of a four-width step structure, a double-width step structure or a single-width step structure. The preparation method comprises: (1) bonding a supporting substrate and a single crystal substrate subjected to ion implantation to each other, and performing heat treatment and stripping to obtain a composite silicon carbide substrate intermediate product; and (2) alternately performing oxidative modification and abrasive particle removal on a side surface of a single crystal layer of the composite silicon carbide substrate intermediate product, i.e., forming a periodic atomic-scale step structure on the side surface of the single crystal layer to obtain a composite silicon carbide substrate. The composite silicon carbide substrate provided by the present application satisfies the manufacturing requirements of a high-voltage power device for a large-thickness and high-quality silicon carbide epitaxial layer, and the preparation method is simple and efficient and has good controllability.

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Inventors:
GUO CHAO (CN)
MU FENGWEN (CN)
Application Number:
PCT/CN2023/075242
Publication Date:
February 29, 2024
Filing Date:
February 09, 2023
Export Citation:
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Assignee:
TJ INNOVATIVE SEMICONDUCTOR SUBSTRATE TECH CO LTD (CN)
International Classes:
H01L29/06; H01L21/04; H01L29/16
Foreign References:
CN115101584A2022-09-23
CN114864529A2022-08-05
CN104979184A2015-10-14
CN109686656A2019-04-26
CN113690298A2021-11-23
CN111235633A2020-06-05
US6214107B12001-04-10
CN103608899A2014-02-26
Attorney, Agent or Firm:
BEYOND ATTORNEYS AT LAW (CN)
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